List of Stepping Motor Products
In our product model name, “PM” is added in the end for the robot using the stepping motor .
| Model Name | Arm/End-Effector | Robot Model Type | Motor Type | Carrying Object |
|---|---|---|---|---|
| SCR3100S (For small wafer) |
Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Up to 150mm wafer |
| SCR3130CS | Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| SCR3160CS | Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| SSCR3090S (For small wafer) |
Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Up to 100mm wafer |
| STCR4130S | Twin arm | 4-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| STCR4160S | Twin arm | 4-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| STCR4160S (with flip unit) |
Twin arm | 4-Axis Cylindrical Coordinate | Stepping motor | SEMI standard 150, 200mm silicon wafer |
| STCR4160SN (For thin wafer or wafer-edge hold) |
Twin arm | 4-Axis Cylindrical Coordinate | 2-phase pulse motors installed in all axes. | Up to 300mm silicon wafer |
| STWCR4160 (Waterproof) | Twin arm | 4-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| SVCR3160 | Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| SVCR3190 (High rigid type) |
Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| SVCR3260 | Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |
| SVCR3330S (Handling susceptor/tray) |
Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | 342mm tray x 2 (Representative example) |
| SWCR3160CS (Waterproof) |
Single arm | 3-Axis Cylindrical Coordinate | Stepping motor | Wafer up to 300mm |