Robot for Semiconductor
STCR4160SN (For thin wafer or wafer-edge hold)4-Axis Cylindrical Coordinate Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
| Model Name | STCR4160SN |
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| Environment | Clean room atmosphere |
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| Arm | Twin arm |
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| Operating Range | 475mm (3rd joint center) |
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| Vertical Stroke | 200mm / 300mm / 400mm / 450mm / 500mm |
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| Payload Capacity | 3kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| STCR4160SN-200-PM | 200mm |
| STCR4160SN-300-PM | 300mm |
| STCR4160SN-400-PM | 400mm |
| STCR4160SN-450-PM | 450mm |
| STCR4160SN-500-PM | 500mm |
- The image above and the video are of STCR4160SN-300-PM.
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Characteristics
For handling thin wafer or wafer-edge hold with low-cost, high-speed handling, and no step-out error
- High reliability: Stepping motor installed, but no step-out by JEL unique control.
- High rigidity: payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector and wafer)
- Base or flange mounting type is selectable.
Standard Specifications
Specifications: upper end-effector with JEL end-effector by vacuum suction (wafer edge); lower end-effector with JEL Bernoulli End-effector for thin wafer
| Robot Model |
STCR4160SN-300-PM |
| Wrist-Brock |
SART09362 |
End-Effector |
Upper end-effector: 3D-09371
Lower end-effector: 3D-09370 |
| Carrying Object |
Up to 300mm silicon wafer |
| Wafer Holding Method |
Upper end-effector: By vacuum suction (wafer edge)
Lower end-effector: By Cyclone pad suction and friction generated by friction rubber (Various materials are available for contact parts.) |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
4-axis |
| Motor Type |
2-phase pulse motors installed in all axes. |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 625mm |
340deg |
300mm |
| Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 400mm/sec |
180deg/sec |
200mm/sec |
| Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 800mm/sec |
220deg/sec |
250mm/sec |
| Repeatability |
Within ±0.1mm |
| Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
| Utility |
Power: DC24V±10% 16A
Clean air: 60 SLM or more, 0.1 to 0.3 MPa Vacuum: -53kPa or more |
| Mass |
Approx. 30kg (Robot) |
| Controller Model |
C4000 series |
| Interface |
RS232C and parallel photo I/O |
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Option
Other Option
Product Lineup
