Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
320mm (3rd joint center)
20mm / 40mm
2kg (calculated for the arm 3rd joint)
List of Product Model
The image above and the video are of SVCR3260-040-PM.
Designed for handling wafers in the vacuum chamber of production line and inspection line.
Double payload and superior cost performance compared to SVHR series.
Compatible with SVHR series and it is possible to replace or upgrade into SVCR series.
Magnetic fluid sealing is used for arm joint.
Vacuum sealing: Magnetic fluid sealing and bellows are used.
For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.