JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

SVCR3330S (Handling susceptor/tray)3-Axis Cylindrical Coordinate Clean Robot


Product Video

Usage Environment/Specifications

Product Profile

Model NameSVCR3330S
EnvironmentVacuum (Temp. 15°C to 50°C)
Driving unit:Clean room atmosphere  (Temp. 15°C to 40°C)
ArmSingle arm
Operating Range640mm (3rd joint center)
Vertical Stroke60mm
Payload Capacity10kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
  • The image above and the video are of SVCR3330S-060-PM.


Designed for handling susceptor tray up to 4kg with shuttle type twin end-effector in the vacuum chamber of production line and inspection line.
Cost performance is superior compared to LVHR series.

  • Magnetic fluid sealing is used for arm joint.
  • Vacuum sealing: Magnetic fluid sealing and bellows are used.
  • For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • 2-phase stepping motor installed in all axes.
  • Servo motor type is available.
  • High-speed, high-accuracy wafer handlingby S-curved speed control.
  • Wafer holding: end-effector with passive edge or edge grip type End-effector.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of SVCR3330S-060-PM (stepping motor type)
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model SVCR3330S-060-PM
Carrying Object 342mm tray x 2 (Representative example)
Robot Model Type Cylindrical coordinate type Control Axis 3-axis
Motor Type Stepping motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1075mm 330deg 60mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
250mm/sec 90deg/sec 30mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
380mm/sec 135deg/sec 45mm/sec
Resolution Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
Below 65µm 0.0056deg 2.777µm
Handling level 188.5mm (Mounting level to end-effector level)
Repeatability Within ±0.2mm
Cleanliness Magnetic fluid sealing and filter
Vacuum resistance 1.33×10-6Pa
Utility Power: DC24V±10% 11A
Specifications of Controller
Controller Model C4000 series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)



*Click the items below to review the end-effectors other than JEL standard types.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking