Robot for Semiconductor

SVCR3330S (Handling susceptor/tray)3-Axis Cylindrical Coordinate Clean Robot

Product Video

Usage Environment/Specifications

Product Profile

Model Name	SVCR3330S
Environment	Vacuum (Temp. 15°C to 50°C)
Environment	Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Arm	Single arm
Operating Range	640mm (3rd joint center)
Vertical Stroke	60mm
Payload Capacity	10kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
SVCR3330S-060-PM		60mm

The image above and the video are of SVCR3330S-060-PM.

Characteristics

Designed for handling susceptor tray up to 4kg with shuttle type twin end-effector in the vacuum chamber of production line and inspection line.
Cost performance is superior compared to LVHR series.

Magnetic fluid sealing is used for arm joint.
Vacuum sealing: Magnetic fluid sealing and bellows are used.
For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
2-phase stepping motor installed in all axes.
Servo motor type is available.
High-speed, high-accuracy wafer handlingby S-curved speed control.
Wafer holding: end-effector with passive edge or edge grip type End-effector.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of SVCR3330S-060-PM (stepping motor type)
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model	SVCR3330S-060-PM
Carrying Object	342mm tray x 2 (Representative example)
Robot Model Type	Cylindrical coordinate type	Control Axis	3-axis
Motor Type	Stepping motor
Operating Range	From the robot center to the wafer center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	1075mm	330deg	60mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	250mm/sec	90deg/sec	30mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	380mm/sec	135deg/sec	45mm/sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 65µm	0.0056deg	2.777µm
Handling level	188.5mm (Mounting level to end-effector level)
Repeatability	Within ±0.2mm
Cleanliness	Magnetic fluid sealing and filter
Vacuum resistance	1.33×10^-6Pa
Utility	Power: DC24V±10% 11A
Specifications of Controller
Controller Model	C4000 series
Interface	RS232C and parallel photo I/O

Outline Drawing (Standard)

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking