JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

SWCR3160CS (Waterproof)3-Axis Cylindrical Coordinate Clean Robot


Product Video

Usage Environment/Specifications

Product Profile

Model NameSWCR3160CS
EnvironmentClean room atmosphere
ArmSingle arm
Operating Range312mm (3rd joint center)
Vertical Stroke200mm / 300mm
Payload CapacityBelow 3kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
  • The image above and the video are of SWCR3160CS-200-PM (Waterproof).


Designed for handling 300mm wafers in a LSI production line under the condition of acid or alkaline mist (IP64).
Flip and edge grip functions are available.

  • Corrosion protection for arm by Teflon coating
  • V-type seals are used for waterproof of arm joint.
  • Viton seals are used for parts joint.
  • Bellows are used for waterproof of vertical axis.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • 2-phase stepping motor installed in all axes.
  • High-speed, high-accuracy wafer handlingby S-curved speed control.
  • Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with edge grip type end-effector.
Specifications of Robot
Carrying Object Wafer up to 300mm
Wafer Holding Method By edge grip
Robot Model Type Cylindrical coordinate type Control Axis 3-axis
Motor Type Stepping motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
312mm 340deg 300mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
250mm/sec 120deg/sec 70mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
500mm/sec 160deg/sec 85mm/sec
Resolution Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
Below 49µm 0.0214deg Below 12.5µm
Handling level 255mm (Mounting level to end-effector level)
Repeatability Within ±0.2mm
Utility Power: DC24V±10% 15A; Positive pressure: 0.15MP
Specifications of Controller
Controller Model C4000 series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)



*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking