Robot for Semiconductor
SWCR3160CS (Waterproof)3-Axis Cylindrical Coordinate Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
| Model Name | SWCR3160CS |
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| Environment | Clean room atmosphere |
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| Arm | Single arm |
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| Operating Range | 312mm (3rd joint center) |
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| Vertical Stroke | 200mm / 300mm |
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| Payload Capacity | Below 3kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| SWCR3160CS-200-PM | 200mm |
| SWCR3160CS-300-PM | 300mm |
- The image above and the video are of SWCR3160CS-200-PM (Waterproof).
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Characteristics
Designed for handling 300mm wafers in a LSI production line under the condition of acid or alkaline mist (IP64).
Flip and edge grip functions are available.
- Corrosion protection for arm by Teflon coating
- V-type seals are used for waterproof of arm joint.
- Viton seals are used for parts joint.
- Bellows are used for waterproof of vertical axis.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with edge grip type end-effector.
| Carrying Object |
Wafer up to 300mm |
| Wafer Holding Method |
By edge grip |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
3-axis |
| Motor Type |
Stepping motor |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 312mm |
340deg |
300mm |
| Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 250mm/sec |
120deg/sec |
70mm/sec |
| Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 500mm/sec |
160deg/sec |
85mm/sec |
| Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| Below 49µm |
0.0214deg |
Below 12.5µm |
| Handling level |
255mm (Mounting level to end-effector level) |
| Repeatability |
Within ±0.2mm |
| Utility |
Power: DC24V±10% 15A; Positive pressure: 0.15MP |
| Controller Model |
C4000 series |
| Interface |
RS232C and parallel photo I/O |
Option
End-Effector
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
Product Lineup
