Robot for Semiconductor
STCR4160S4-Axis Cylindrical Coordinate Clean Robot
Product Video
VIDEO
Usage Environment/Specifications
Product Profile
Model Name STCR4160S
Environment Clean room atmosphere
Arm Twin arm
Operating Range 315mm (3rd joint center)
Vertical Stroke 200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
Payload Capacity Below 3kg (calculated for the arm 3rd joint)
List of Product Model
Product Model Vertical Stroke
STCR4160S-200-PM 200mm
STCR4160S-300-PM 300mm
STCR4160S-400-PM 400mm
STCR4160S-450-PM 450mm
STCR4160S-500-PM 500mm
STCR4160S-550-PM 550mm
STCR4160S-600-PM 600mm
The image above and the video are of STCR4160S-300-PM.
Characteristics
Designed for handling small wafers in a production line or inspection line of semiconductor.
Certified CE marking.
Arm lineup: 100mm, 130mm, 160mm, 200mm
Twin-arm reduces the wafer swap time.
Base or flange mounting type is selectable.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
2-phase stepping motor installed in all axes.
High-speed, high-accuracy wafer handlingby S-curved speed control.
Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
End-effector material: CFRP, Al, ceramic, or others.
Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with JEL standard end-effector (vacuum type)
Robot Model
STCR4160S-300-PM
Carrying Object
Wafer up to 300mm
Wafer Holding Method
By vacuum suction
Robot Model Type
Cylindrical coordinate type
Control Axis
4-axis
Motor Type
Stepping motor
Operating Range
From the robot center to the wafer center
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
575mm
340deg
300mm
Carrying Speed (Ave.)
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
570mm/sec
220deg/sec
200mm/sec
Carrying Speed (Max.)
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
1140mm/sec
270deg/sec
250mm/sec
Resolution
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
Below 12.6µm
0.0045deg
6.25µm
Handling level
620mm (Base mounting level to upper end-effector level)
Repeatability
Within ±0.1mm
Cleanliness
ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility
Power: DC24V±10% 16A; Vacuum: -53kPa or more
Mass
Approx. 30kg
Controller Model
C4000 series
Interface
RS232C and parallel photo I/O
*The outline drawing above does not have the mapping function.
Outline Drawing (w/o mapping function)
Outline Drawing (w/mapping function)
Option
Wrist-Block Unit
Model Name
Total Length
Mapping Sensor
Thickness of Attaching End-Effector
SART08674
60mm
2mm
SART08604
60mm
2mm
SART08675
155mm
2mm
SART08661
155mm
Available
2mm
SART08676
60mm
2mm
SART08668
60mm
Available
2mm
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
Model Name
Size of Carrying Object
End-effector Type (Thickness)
Wafer Holding Method
SC-IW-200
3 inch, 100mm to 200mm
I-shape (2mm)
Vacuum suction
SC-IW-240
3 inch, 100mm to 300mm
I-shape (2mm)
Vacuum suction
SC-YW-200
100mm to 200mm
Y-shape (2mm)
Vacuum suction
SC-YW-227
100mm to 300mm
Y-shape (2mm)
Vacuum suction
SC-YW-240
100mm to 300mm
Y-shape (2mm)
Vacuum suction
3D-02229
150mm to 300mm
Y-shape (2mm)
Vacuum suction
SC3-YW-240
300mm
Y-shape (3mm)
Vacuum suction
3D-01661
300mm
Y-shape (3mm)
Vacuum suction
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
End-Effector/Wrist-Block Unit
SART08674
SART08604
SART08675
SART08661
SART08676
SART08668
SC-IW-200
405mm
405mm
500mm
500mm
405mm
405mm
SC-IW-240
445mm
445mm
540mm
540mm
445mm
445mm
SC-YW-200
415mm
415mm
510mm
510mm
415mm
415mm
SC-YW-227
442mm
442mm
537mm
537mm
442mm
442mm
SC-YW-240
455mm
455mm
550mm
550mm
455mm
455mm
3D-02229
455mm
455mm
550mm
550mm
455mm
455mm
SC3-YW-240
455mm
455mm
550mm
550mm
455mm
455mm
3D-01661
455mm
455mm
550mm
550mm
455mm
455mm
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
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