JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

STCR4160S4-Axis Cylindrical Coordinate Clean Robot

STCR4160S

Product Video

Usage Environment/Specifications

Product Profile

Model NameSTCR4160S
EnvironmentClean room atmosphere
ArmTwin arm
Operating Range315mm (3rd joint center)
Vertical Stroke200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
Payload CapacityBelow 3kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
STCR4160S-200-PM200mm
STCR4160S-300-PM300mm
STCR4160S-400-PM400mm
STCR4160S-450-PM450mm
STCR4160S-500-PM500mm
STCR4160S-550-PM550mm
STCR4160S-600-PM600mm
  • The image above and the video are of STCR4160S-300-PM.

Characteristics

Designed for handling small wafers in a production line or inspection line of semiconductor.
Certified CE marking.

  • Arm lineup: 100mm, 130mm, 160mm, 200mm
  • Twin-arm reduces the wafer swap time.
  • Base or flange mounting type is selectable.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • 2-phase stepping motor installed in all axes.
  • High-speed, high-accuracy wafer handlingby S-curved speed control.
  • Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with JEL standard end-effector (vacuum type)
Specifications of Robot
Robot Model STCR4160S-300-PM
Carrying Object Wafer up to 300mm
Wafer Holding Method By vacuum suction
Robot Model Type Cylindrical coordinate type Control Axis 4-axis
Motor Type Stepping motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
575mm 340deg 300mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
570mm/sec 220deg/sec 200mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1140mm/sec 270deg/sec 250mm/sec
Resolution Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
Below 12.6µm 0.0045deg 6.25µm
Handling level 620mm (Base mounting level to upper end-effector level)
Repeatability Within ±0.1mm
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility Power: DC24V±10% 16A; Vacuum: -53kPa or more
Mass Approx. 30kg
Specifications of Controller
Controller Model C4000 series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
STCR4160S-300-PM *The outline drawing above does not have the mapping function.
  • Outline Drawing (w/o mapping function)

  • Outline Drawing (w/mapping function)

Option

Wrist-Block Unit
Model Name Total Length Mapping Sensor Thickness of Attaching End-Effector
SART08674 60mm   2mm
SART08604 60mm   2mm
SART08675 155mm   2mm
SART08661 155mm Available 2mm
SART08676 60mm   2mm
SART08668 60mm Available 2mm

*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.

End-Effector
Model Name Size of Carrying Object End-effector Type (Thickness) Wafer Holding Method
SC-IW-200 3 inch, 100mm to 200mm I-shape (2mm) Vacuum suction
SC-IW-240 3 inch, 100mm to 300mm I-shape (2mm) Vacuum suction
SC-YW-200 100mm to 200mm Y-shape (2mm) Vacuum suction
SC-YW-227 100mm to 300mm Y-shape (2mm) Vacuum suction
SC-YW-240 100mm to 300mm Y-shape (2mm) Vacuum suction
3D-02229 150mm to 300mm Y-shape (2mm) Vacuum suction
SC3-YW-240 300mm Y-shape (3mm) Vacuum suction
3D-01661 300mm Y-shape (3mm) Vacuum suction

*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.

Operating Range
End-Effector/Wrist-Block Unit SART08674 SART08604 SART08675 SART08661 SART08676 SART08668
SC-IW-200 405mm 405mm 500mm 500mm 405mm 405mm
SC-IW-240 445mm 445mm 540mm 540mm 445mm 445mm
SC-YW-200 415mm 415mm 510mm 510mm 415mm 415mm
SC-YW-227 442mm 442mm 537mm 537mm 442mm 442mm
SC-YW-240 455mm 455mm 550mm 550mm 455mm 455mm
3D-02229 455mm 455mm 550mm 550mm 455mm 455mm
SC3-YW-240 455mm 455mm 550mm 550mm 455mm 455mm
3D-01661 455mm 455mm 550mm 550mm 455mm 455mm
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.


Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking