Robot for Semiconductor
SSCR3090S (For small wafer)3-Axis Cylindrical Coordinate Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
| Model Name | SSCR3090S |
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| Environment | Clean room atmosphere |
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| Arm | Single arm |
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| Operating Range | 175mm (3rd joint center) |
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| Vertical Stroke | 150mm |
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| Payload Capacity | Below 0.1kg (wafer only, calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| SSCR3090S-150-PM | 150mm |
- The video is of SSCR3090S and SAL2241.
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Characteristics
Designed for handling small wafers in a production line or inspection line of semiconductor or LED production.
Minimized footprint and lightened weight compactify the system layout.
- Arm lineup: 90mm
- It has compatible unit with SSCR2090S-PM and can be changed into link arm type and Z-axis less type.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with JEL standard end-effector (vacuum type)
| Robot Model |
SSCR3090S-PM |
| Carrying Object |
Up to 100mm wafer |
| Wafer Holding Method |
By vacuum suction |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
3-axis |
| Motor Type |
Stepping motor |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 300mm (Link arm type) |
370deg |
150mm |
| Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 220mm/sec |
180deg/sec |
120mm/sec |
| Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 330mm/sec |
280deg/sec |
160mm/sec |
| Repeatability |
Within ±0.1mm |
| Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
| Utility |
Power: DC24V±10% 4A; Vacuum: -53kPa or more |
| Controller Model |
C4301 series |
| Interface |
RS232C and parallel photo I/O |
Option
End-Effector
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
Product Lineup
