JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

SCR3160CS3-Axis Cylindrical Coordinate Clean Robot


Product Video

Usage Environment/Specifications

Product Profile

Model NameSCR3160CS
EnvironmentClean room atmosphere
ArmSingle arm
Operating Range340mm (3rd joint center)
Vertical Stroke200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
Payload Capacity3kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
  • The image is of SCR3100CS-200-PM and the video is of SCR3160CS-300-PM.


Designed for handling small wafers in a production line or inspection line of semiconductor.

  • Arm lineup: 100mm, 130mm, 160mm, 200mm
  • Base or flange mounting type is selectable.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • 2-phase stepping motor installed in all axes.
  • High-speed, high-accuracy wafer handlingby S-curved speed control.
  • Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with JEL standard end-effector (vacuum type)
Specifications of Robot
Robot Model SCR3160CS-300-PM
Carrying Object Wafer up to 300mm
Wafer Holding Method By vacuum suction
Robot Model Type Cylindrical coordinate type Control Axis 3-axis
Motor Type Stepping motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
502.7mm 340deg 300mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
610mm/sec 340deg/sec 250mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1220mm/sec 500deg/sec 320mm/sec
Resolution Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
Below 12.6µm 0.0045deg 6.25µm
Repeatability Within ±0.1mm
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility Power: DC24V±10% 15A; Vacuum: -53kPa or more
Mass Approx. 25kg
Specifications of Controller
Controller Model C4000 series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)


Wrist-Block Unit
Model Name Total Length Mapping Sensor Thickness of Attaching End-Effector
SARS00169 38mm None 2mm
SARS00958 38mm None 3mm
SARS02659 75mm None 2mm
SARS02967 75mm None 3mm
SARS08603 80mm Transmissive sensor/Reflective sensor 2mm

*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.

Model Name Size of Carrying Object End-effector Type (Thickness) Wafer Holding Method
SC-IW-200 3 inch, 100mm to 200mm I-shape (2mm) Vacuum suction
SC-IW-240 3 inch, 100mm to 300mm I-shape (2mm) Vacuum suction
SC-YW-200 100mm to 200mm Y-shape (2mm) Vacuum suction
SC-YW-227 100mm to 300mm Y-shape (2mm) Vacuum suction
SC-YW-240 100mm to 300mm Y-shape (2mm) Vacuum suction
3D-02229 150mm to 300mm Y-shape (2mm) Vacuum suction
SC3-YW-240 300mm Y-shape (3mm) Vacuum suction
3D-01661 300mm Y-shape (3mm) Vacuum suction

*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.

Operating Range
End-Effector/Wrist-Block Unit SARS00169 SARS02659 SARS08603 SARS00958 SARS02967
SC-IW-200 357.7mm 420mm 425mm - -
SC-IW-240 397.7mm 460mm 465mm - -
SC-YW-200 367.7mm 430mm 435mm - -
SC-YW-227 394.7mm 457mm 462mm - -
SC-YW-240 407.7mm 470mm 475mm - -
3D-02229 407.7mm 470mm 475mm - -
SC3-YW-240 - - - 407.7mm 470mm
3D-01661 - - - 407.7mm 470mm
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.

Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking