Robot for Semiconductor
STWCR4160 (Waterproof)4-Axis Cylindrical Coordinate Clean Robot
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Usage Environment/Specifications
Product Profile
| Model Name | STWCR4160 |
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| Environment | Clean room atmosphere |
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| Arm | Twin arm |
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| Operating Range | 315 mm (3rd joint center) |
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| Vertical Stroke | 300 mm |
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| Payload Capacity | Below 3 kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| STWCR4160-300-PM | 300 mm |
- The image above is of STWCR4160-300-PM (Waterproof).
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Characteristics
STWCR4000 series, 4-axis cylindrical coordinate clean robot (waterproof), is designed for handling wafers under the condition of acid or alkaline mist (IP64). Flip operation for 300 mm wafers with edge grip functions.
- Arm lineup: 160 mm, 200 mm
- Corrosion protection for arm by Teflon coating.
- V-type seals are used for waterproof of arm joint.
- Viton seals are used for parts joint.
- Bellows are used for waterproof of vertical axis.
- Twin-arm reduces the wafer swap time.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handling by S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
- End-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with edge grip type end-effector.
| Robot Model |
STWCR4160-300-PM |
| Carrying Object |
Wafer up to 300mm |
| Wafer Holding Method |
By vacuum suction |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
4-axis |
| Motor Type |
Stepping motor |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 315 mm |
340 deg |
300 mm |
| Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 280 mm/sec |
90 deg/sec |
90 mm/sec |
| Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 550 mm/sec |
120 deg/sec |
120 mm/sec |
| Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| Below 126 µm |
0.0045 deg |
Below 6.25 µm |
| Repeatability |
Within ±0.2 mm |
| Utility |
Power: DC24V±10% 11A; Positive Pressure: 0.15 MPa |
| Controller Model |
C4000 series |
| Interface |
RS232C and parallel photo I/O |
Product Lineup
