JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

STWCR4160 (Waterproof)4-Axis Cylindrical Coordinate Clean Robot


Usage Environment/Specifications

Product Profile

Model NameSTWCR4160
EnvironmentClean room atmosphere
ArmTwin arm
Operating Range315 mm (3rd joint center)
Vertical Stroke300 mm
Payload CapacityBelow 3 kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
STWCR4160-300-PM300 mm
  • The image above is of STWCR4160-300-PM (Waterproof).


STWCR4000 series, 4-axis cylindrical coordinate clean robot (waterproof), is designed for handling wafers under the condition of acid or alkaline mist (IP64). Flip operation for 300 mm wafers with edge grip functions.

  • Arm lineup: 160 mm, 200 mm
  • Corrosion protection for arm by Teflon coating.
  • V-type seals are used for waterproof of arm joint.
  • Viton seals are used for parts joint.
  • Bellows are used for waterproof of vertical axis.
  • Twin-arm reduces the wafer swap time.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • 2-phase stepping motor installed in all axes.
  • High-speed, high-accuracy wafer handling by S-curved speed control.
  • Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
  • End-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with edge grip type end-effector.
Specifications of Robot
Robot Model STWCR4160-300-PM
Carrying Object Wafer up to 300mm
Wafer Holding Method By vacuum suction
Robot Model Type Cylindrical coordinate type Control Axis 4-axis
Motor Type Stepping motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
315 mm 340 deg 300 mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
280 mm/sec 90 deg/sec 90 mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
550 mm/sec 120 deg/sec 120 mm/sec
Resolution Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
Below 126 µm 0.0045 deg Below 6.25 µm
Repeatability Within ±0.2 mm
Utility Power: DC24V±10% 11A; Positive Pressure: 0.15 MPa
Specifications of Controller
Controller Model C4000 series
Interface RS232C and parallel photo I/O

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking