Robot for Semiconductor

STWCR4160 (Waterproof)4-Axis Cylindrical Coordinate Clean Robot

Usage Environment/Specifications

Product Profile

Model Name	STWCR4160
Environment	Clean room atmosphere
Arm	Twin arm
Operating Range	315 mm (3rd joint center)
Vertical Stroke	300 mm
Payload Capacity	Below 3 kg (calculated for the arm 3rd joint)

List of Product Model

Product Model		Vertical Stroke
STWCR4160-300-PM		300 mm

The image above is of STWCR4160-300-PM (Waterproof).

Characteristics

STWCR4000 series, 4-axis cylindrical coordinate clean robot (waterproof), is designed for handling wafers under the condition of acid or alkaline mist (IP64). Flip operation for 300 mm wafers with edge grip functions.

Arm lineup: 160 mm, 200 mm
Corrosion protection for arm by Teflon coating.
V-type seals are used for waterproof of arm joint.
Viton seals are used for parts joint.
Bellows are used for waterproof of vertical axis.
Twin-arm reduces the wafer swap time.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
2-phase stepping motor installed in all axes.
High-speed, high-accuracy wafer handling by S-curved speed control.
Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
End-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with edge grip type end-effector.
Specifications of Robot
Robot Model	STWCR4160-300-PM
Carrying Object	Wafer up to 300mm
Wafer Holding Method	By vacuum suction
Robot Model Type	Cylindrical coordinate type	Control Axis	4-axis
Motor Type	Stepping motor
Operating Range	From the robot center to the wafer center	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Operating Range	315 mm	340 deg	300 mm
Carrying Speed (Ave.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Ave.)	280 mm/sec	90 deg/sec	90 mm/sec
Carrying Speed (Max.)	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Carrying Speed (Max.)	550 mm/sec	120 deg/sec	120 mm/sec
Resolution	Arm (R-axis)	Rotation Angle (Theta-axis)	Vertical Stroke (Z-axis)
Resolution	Below 126 µm	0.0045 deg	Below 6.25 µm
Repeatability	Within ±0.2 mm
Utility	Power: DC24V±10% 11A; Positive Pressure: 0.15 MPa
Specifications of Controller
Controller Model	C4000 series
Interface	RS232C and parallel photo I/O

Product Lineup

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Single arm
...Twin arm
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking