Head Office Showroom
- JEL Corporation Head Office
Current Displayed Robots
New models and main products are on display in Head Office Showroom.
Please contact the address above for a visit.
- 5-Axis Horizontal and Multi-Joint Type Clean Robot: GTFR5280/
Multi work aligner: SAL38C3HV
- Designed for handling wafers in EFEM.
New type of aligner available for any material of wafer for 200 to 300 mm wafer.
- for 25 wafers batch transfer, 300 mm wafers: KHR3480
- Capable of transferring 25 wafers at once.
The transfer time can be significantly reduced by batch transfer.
Available for the layout with multiple cassettes by equipping a rotation axis.
- Clean robot with batch end-effector for 5 pieces of wafer: MTCR4160L
- High-speed handling of cassette with different pitches for such as vertical furnace.
- Wafer transfer robot: STCR4160SN-300-CM/
Aligner: SAL38C2(Optical Aligner)
- New type of twin-arm clean robot with low-cost, high-speed handling, and no step-out error.
Wafer aligner for semiconductor production or inspection lines.
- Automatic wafer transfer system for wafer container: SSY-20010
- High accuracy transport of thin wafer inside the wafer container.
- Table-top loader system for 100mm wafer: SSY-10000
- Available for various types of wafers; 2, 3 inch, 100mm glass, sapphire, SiC, or GaN or others
- Table-top Loader System: SSY-10000
- Resolved the problems and issues caused by manual handling of wafers. Also improved product quality and yield ratio.
- Bernoulli type end-effector (Contact type/Non-contact type) and Bernoulli hand for thin or warped wafer
- Low-cost Bernoulli type end-effector available for customization. As an ideal end-effector for thin and warped wafers, we provide the Bernoulli type end-effector at its most suitable design according to the customers’ system layout.