JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

GCR4210 (AC servo motor)4-Axis Horizontal and Multi-Joint Type Clean Robot


Product Video

Usage Environment/Specifications

Product Profile

Model NameGCR4210
EnvironmentClean room atmosphere
ArmSingle arm
Operating Range400mm (3rd joint center)
Vertical Stroke300mm / 320mm / 500mm
Payload CapacityBelow 4kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
  • The image above and the video are of GCR4210-300-AM.


Designed for handling 300mm wafers in a production line or inspection line of semiconductor.
Execution of origin search is not required by using the servo motors with absolute encoders.

  • 2 FOUP access is available without a track.
  • Base or flange mounting type is selectable.
  • Motion monitoring is available.
  • AC servo motors with absolute encoders installed in all axes
  • RS232C and parallel photo I/O are standard for control.
  • High-speed, high-accuracy wafer handling by S-curved speed control and optimizing pass control.
  • 1.8 times faster compared to GHR4206 type.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Example of standard specifications with JEL standard end-effector (vacuum type)
Specifications of Robot
Robot Model GCR4210-300-AM
Carrying Object Up to 300mm silicon wafer
Wafer Holding Method By vacuum suction
Robot Model Type Horizontal and multi-joint type Control Axis 4-axis
Motor Type AC servo motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
760mm 335deg 300mm
Carrying Speed Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
635mm/0.8sec 335deg/1.0sec 300mm/0.9sec
Repeatability Within ±0.1mm
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility Power: AC200V Single phase ±10% 2kVA; Vacuum: -53kPa or more
Mass Approx. 37kg
Specifications of Controller
Controller Model C5000S series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)


Wrist-Block Unit
Model Name Total Length Mapping Sensor Thickness of Attaching End-Effector
SARS00169 38mm None 2mm
SARS00958 38mm None 3mm
SARS02659 75mm None 2mm
SARS02967 75mm None 3mm
SARS08603 80mm Transmissive sensor/Reflective sensor 2mm

*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.

Model Name Size of Carrying Object End-effector Type (Thickness) Wafer Holding Method
SC-IW-200 3 inch, 100mm to 200mm I-shape (2mm) Vacuum suction
SC-IW-240 3 inch, 100mm to 300mm I-shape (2mm) Vacuum suction
SC-YW-200 100mm to 200mm Y-shape (2mm) Vacuum suction
SC-YW-227 100mm to 300mm Y-shape (2mm) Vacuum suction
SC-YW-240 100mm to 300mm Y-shape (2mm) Vacuum suction
3D-02229 150mm~300mm Y-shape (2mm) Vacuum suction
SC3-YW-240 300mm Y-shape (3mm) Vacuum suction
3D-01661 300mm Y-shape (3mm) Vacuum suction
SC3-IW-240 300mm I-shape (3mm) Vacuum suction

*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.

Operating Range
End-Effector/Wrist-Block Unit SARS00169 SARS02659 SARS08603 SARS00958 SARS02967
SC-IW-200 562.7mm 625mm 630mm - -
SC-IW-240 602.7mm 665mm 670mm - -
SC-YW-200 572.7mm 635mm 640mm - -
SC-YW-227 599.7mm 662mm 667mm - -
SC-YW-240 612.7mm 675mm 680mm - -
3D-02229 612.7mm 675mm 680mm - -
SC3-YW-240 - - - 612.7mm 675mm
3D-01661 - - - 612.7mm 675mm
SC3-IW-240 - - - 602.7mm 665mm
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.

Other Option

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking