JEL-Leading Manufacturer of Clean Robot


SSY-10000 (Table-top loader system for 100mm wafer)Wafer Transfer System


Product Video

Usage Environment/Specifications

Product Profile

Product ModelSSY-10000
EnvironmentClean room atmosphere
Operating Range225mm (Distance to wafer center)
Wafer SizeUp to 100mm
Carrying ObjectGlass, sapphire, SiC, or GaN or other wafers
Contact us for the detailed specifications.
Payload Capacity0.1kg (Wafer only)
  • The image above and the video are of SSY-10000 (Table-top loader system for 100mm wafer).


For various types of wafers; 2, 3 inch, 100mm glass, sapphire, SiC, or GaN or others.
Customization is available.

  • Compact system integrating wafer inspection stage into wafer handling system.
  • Long stroke of 190mm X-axis and 200mm Y-axis. Wafer stage position can be manually adjusted with a handle.
  • Twin end-effector reduces the wafer swap time.
  • Low-cost & high-performance system combining robot and passive type alignment stage.

Standard Specifications

Carrying Object Up to 100mm wafer (glass, sapphire, SiC, or GaN or others)
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
225mm 360deg 150mm
Carrying Speed
Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
225mm/sec 500deg/sec 200mm/sec
Carrying Speed
Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
300mm/sec 700deg/sec 300mm/sec
Wafer Holding Method By vacuum suction
Repeatability Within ±0.1mm
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Mass Approx. 15kg (Robot)
Utility Power: AC100V±10% 0.2kVA   Vacuum: -53kPa or more
Outline Drawing (Standard)


Other Option

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking