SC-YW-227Vacuum Type End-Effector
|Carrying Size||100 to 300mm|
|Carrying Object||Mainly silicon wafer|
Y-shaped vacuum suction type end-effector, suitable for handling wafer from 100 to 300mm (Random access is available).
Used extensively for atmospheric robot, the end-effector holds the backside of wafer by vacuum suction (negative pressure).
Conductive Teflon coating on the surface of end-effector protects against damage from charging.
||SEMI standard 100 to 300mm (Mainly silicon wafer)
||High purity alumina ceramic sintered body
||Conductive Teflon coating
|Wafer Holding Method
Please contact us for the detailed specifications.