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SART08668Wrist-block unit with mapping sensor
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Usage Environment/SpecificationsProduct Profile
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Characteristics
Designed for checking the wafer state in cassette.
Also available for sorter system.
- Wrist-block unit with mapping sensor (*) for STCR series
- Standard end-effectors (6 types) are available for this wrist-block (refer to the following table).
(*) Mapping sensor is to detect wafer presence and status in each cassette slot.
Standard end-effectors available for the wrist-block
Click the product image or name below to go to the product page.
| SC-IW-200 | SC-IW-240 | SC3-IW-240 | SC-YW-227 |
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| SC-YW-200 | 3D-02229 | ||
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Standard Specifications
Contact us for the detailed specifications.
Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Single arm
- ...Twin arm
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking