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SC-IW-200Vacuum Type End-Effector

SC-IW-200

Usage Environment/Specifications


Product Profile

Model NameSC-IW-200
Carrying Size3 inch, 100 to 200mm
Carrying ObjectMainly silicon wafer

Characteristics

I-shaped vacuum suction type end-effector, suitable for handling wafer up to 200mm (Random access is available).
Used extensively for atmospheric robot, the end-effector holds the backside of wafer by vacuum suction (negative pressure).
Conductive Teflon coating on the surface of end-effector protects against damage from charging.


Standard Specifications

Carrying Object SEMI standard 3 inch, 100 to 200mm (Mainly silicon wafer)
Material High purity alumina ceramic sintered body
Surface Treatment Conductive Teflon coating
Wafer Holding Method Vacuum suction
Total Length 200mm
Thickness 2mm

Please contact us for the detailed specifications.

Outline Drawing (Standard)
SC-IW-200

Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking