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SC3-YW-240Vacuum Type End-Effector
Usage Environment/SpecificationsProduct Profile
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Characteristics
Y-shaped vacuum suction type end-effector, suitable for handling 300mm wafer (Random access is available).
Used extensively for atmospheric robot, the end-effector holds the backside of wafer by vacuum suction (negative pressure).
Conductive Teflon coating on the surface of end-effector protects against damage from charging.
Standard Specifications
Carrying Object | SEMI standard 300mm (Mainly silicon wafer) |
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Material | High purity alumina ceramic sintered body |
Surface Treatment | Conductive Teflon coating |
Wafer Holding Method | Vacuum suction |
Total Length | 240mm |
Thickness | 3mm |
Please contact us for the detailed specifications.
Outline Drawing (Standard) |
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Icon guide
- ...Atmosphere
- ...Vacuum
- ...Waterproof
- ...Single arm
- ...Twin arm
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking