Robot for Semiconductor
SCR3160CSN (Closed-loop control)3-Axis Cylindrical Coordinate Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
Model Name | SCR3160CSN |
Environment | Clean room atmosphere |
Arm | Single arm |
Operating Range | 340mm (3rd joint center) |
Vertical Stroke | 200mm / 300mm / 400mm / 450mm / 500mm |
Payload Capacity | 3kg (calculated for the arm 3rd joint) |
List of Product Model
Product Model | Vertical Stroke |
SCR3160CSN-200-CM | 200mm |
SCR3160CSN-300-CM | 300mm |
SCR3160CSN-400-CM | 400mm |
SCR3160CSN-450-CM | 450mm |
SCR3160CSN-500-CM | 500mm |
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Characteristics
New type of 3-axis cylindrical coordinate type single-arm clean robot
For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
- High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
- Reduced origin search time: By absolute encoder
- Equipped with the batteryless multi-rotation absolute sensor
- Robot replacement is available: Compatible with conventional model (installation/performance)
- High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Base or flange mounting type is selectable according to the customer’s system layout.
- Bernoulli end-effector is available (option)
Standard Specifications
Example of specifications with JEL standard end-effector (vacuum type)
Robot Model |
SCR3160CSN-300-CM |
Carrying Object |
Wafer up to 300mm (Available for various types of wafers) |
Wafer Holding Method |
By vacuum suction |
Robot Model Type |
Cylindrical coordinate type |
Control Axis |
3-axis |
Motor Type |
Stepping motor (Closed-loop) |
Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
552.7mm |
340deg |
300mm |
Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
610mm/sec |
340deg/sec |
250mm/sec |
Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
1220mm/sec |
500deg/sec |
320mm/sec |
Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
Below 10.0µm |
0.0015deg |
2.0µm |
Repeatability |
Within ±0.1mm |
Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
Utility |
Power: DC24V±10% 10A Vacuum: -53kPa or more |
Controller Model |
C4000B series |
Interface |
RS232C and parallel photo I/O |
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Option
Wrist-Block Unit
Model Name |
Total Length |
Mapping Sensor |
Thickness of Attaching End-Effector |
SARS00169 |
38mm |
None |
2mm |
SARS00958 |
38mm |
None |
3mm |
SARS02659 |
75mm |
None |
2mm |
SARS02967 |
75mm |
None |
3mm |
SARS08603 |
80mm |
Transmissive sensor/Reflective sensor |
2mm |
*The table above shows the specifications of JEL standard wrist-block units. The other specifications are available.
*Click the items below to review the wrist-block units other than JEL standard types.
End-Effector
Model Name |
Size of Carrying Object |
End-effector Type (Thickness) |
Wafer Holding Method |
SC-IW-200 |
3 inch, 100mm to 200mm |
I-shape (2mm) |
Vacuum suction |
SC-IW-240 |
3 inch, 100mm to 300mm |
I-shape (2mm) |
Vacuum suction |
SC-YW-200 |
100mm to 200mm |
Y-shape (2mm) |
Vacuum suction |
SC-YW-227 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
SC-YW-240 |
100mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
3D-02229 |
150mm to 300mm |
Y-shape (2mm) |
Vacuum suction |
SC3-YW-240 |
300mm |
Y-shape (3mm) |
Vacuum suction |
3D-01661 |
300mm |
Y-shape (3mm) |
Vacuum suction |
SC3-IW-240 |
300mm |
I-shape (3mm) |
Vacuum suction |
*The table above shows the specifications of JEL standard end-effectors. The other specifications are available.
*Click the items below to review the end-effectors other than JEL standard types.
Operating Range
End-Effector/Wrist-Block Unit |
SARS00169 |
SARS02659 |
SARS08603 |
SARS00958 |
SARS02967 |
SC-IW-200 |
502.7mm |
565mm |
570mm |
- |
- |
SC-IW-240 |
542.7mm |
605mm |
610mm |
- |
- |
SC-YW-200 |
512.7mm |
575mm |
580mm |
- |
- |
SC-YW-227 |
539.7mm |
602mm |
607mm |
- |
- |
SC-YW-240 |
552.7mm |
615mm |
620mm |
- |
- |
3D-02229 |
552.7mm |
615mm |
620mm |
- |
- |
SC3-YW-240 |
- |
- |
- |
552.7mm |
615mm |
3D-01661 |
- |
- |
- |
552.7mm |
615mm |
SC3-IW-240 |
- |
- |
- |
542.7mm |
605mm |
*The operating range in the table that is specified by the combination of the wrist-block unit and end-effector is an example only. The other combinations are available.
Other Option
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