Introduction Video of Handling
Waterproof clean robot SWCR3160CS (for 300mm wafer with flip and edge grip function):|
Designed for handling 300mm wafer in a LSI production line under the condition of acid or alkaline mist (IP64).
Corrosion protection for arm by Teflon coating and V-type seals are used for waterproof of arm joint.
*Also available for twin-arm robot: STWCR4160