JEL-Leading Manufacturer of Clean Robot

Introduction Video of Handling

Mapping operation (Through-beam mapping)

Featured mapping operation (through-beam mapping) of some of JEL's transfer robot. Available for various types of wafers and wafer sizes.

*Mapping operation is a function that detects the wafer placement in each slot in cassette.
  • To remove useless processing and shorten tact time by detecting empty wafer.
  • To prevent the wafer breakage by detecting a cross-slotted wafer or double wafer in cassette.

Robots featured in the video:


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