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Introduction Video of Handling

Automatic wafer transfer system for wafer container

SSY-11010 (Automatic wafer transfer system for wafer container):
High accuracy handling of thin wafer inside the wafer container and cassette.
Equipped with mechanism of automatic lid opening/closing of the wafer container (Patent pending).

  • Automatic recognition of wafer and the spacer (interlayer paper) in the wafer container.
  • Automatic wafer transfer between the wafer container and the wafer cassette (package/unpackage).
  • Available for thin wafer as equipped with Bernoulli end-effector.

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