SSY-10000 (Table-top loader system for 3 inch wafer)Wafer transfer system
SSY-10000 is indented to resolve the problems and issues caused by manual handling of wafers, leading to improve product quality and yield ratio.
- Install in the existing manual layout is available.
Lower handling level and small footprint are adaptable even to a table-top layout.
- Wafer can be supplied based on inside-cassette wafer information with mapping function and thin end-effector.
- Safety cover (transparent) and door lock are installed to provide its safety.
Contact us for the detailed specifications.
|Outline Drawing (Standard)|
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking