System

　
• The image and video (*) above is of SSY-11010.

(*) Also see the Introduction Video of Handling  for the details of this system.

High accuracy handling of thin wafer inside the wafer container and cassette.
Equipped with mechanism of automatic lid opening/closing of the wafer container (Patent pending).

• Automatic recognition of wafer and the spacer (interlayer paper) in the wafer container.
• Automatic wafer transfer between the wafer container and the wafer cassette (package/unpackage).
• Available for thin wafer as equipped with Bernoulli end-effector.
• Automatic recognition of the height of wafer.
• The number of cassettes and the wafer sizes can be customized.
• Corresponding to the wafer container made by Achilles Corporation.
• Two fan filter units (HEPA) are installed to ensure the cleanliness.
• Color sensor allows spacers (interlayer papers) with different colors to be detected easily.