SSY-11010Automatic wafer transfer system for wafer container
High accuracy handling of thin wafer inside the wafer container and cassette.
Equipped with mechanism of automatic lid opening/closing of the wafer container (Patent pending).
- Automatic recognition of wafer and the spacer (interlayer paper) in the wafer container.
- Automatic wafer transfer between the wafer container and the wafer cassette (package/unpackage).
- Available for thin wafer as equipped with Bernoulli end-effector.
- Automatic recognition of the height of wafer.
- The number of cassettes and the wafer sizes can be customized.
- Corresponding to the wafer container made by Achilles Corporation.
- Two fan filter units (HEPA) are installed to ensure the cleanliness.
- Color sensor allows spacers (interlayer papers) with different colors to be detected easily.
Contact us for other wafer sizes, the number of wafer containers and cassettes, or aligner installation etc.
||200 mm silicon wafer, 200 mm spacer (interlayer paper)
|Applicable Cassette Type
||200 mm wafer container, 200 mm cassette
||ISO Class 2
||1600 (W) x 1305 (D) x 1800 (H) (mm)
||Power: AC200V±10% Clean air: 0.5 MPa 150 NL/min or more