Introduction Video of Handling
STCR4160S (susceptor/tray handling)：|
Designed for handling susceptor/tray used for LED processing system.
Wafer taken out of a cassette is transferred to the susceptor/tray, which can be automatically transferred to the system by combining with SSY-10020.
*Also available for vacuum robot: SVCR3330S (susceptor/tray handling).