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Introduction Video of Handling

Susceptor/Tray Handling

STCR4160S (susceptor/tray handling)
Designed for handling susceptor/tray used for LED processing system.
Wafer taken out of a cassette is transferred to the susceptor/tray, which can be automatically transferred to the system by combining with SSY-10020.

*Also available for vacuum robot: SVCR3330S (susceptor/tray handling).

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