SSY-10020 (Loader/Unloader System)Wafer transfer system
New type of wafer handling system for wafers including LED.
- Automatic loader/unloader for batch processing such as susceptors or trays is achieved.
- Aligner is installed both for wafers and susceptors, which provides the centering and indexing of wafer notch and susceptors.
Contact us for the detailed specifications.
|Outline Drawing (Standard)|
*The teaching box appeared in the table may be unavailable depending on the specifications.
- ...Thin wafer
- ...CE marking
- ...JEL's standard spec.
- ...KCs marking