JEL-Leading Manufacturer of Clean Robot


SSY-10020 (Loader/Unloader System)Wafer transfer system


Product Video

Usage Environment/Specifications

Product Profile

Product ModelSSY-10020
EnvironmentClean room atmosphere
Wafer Size100mm wafer, 330mm susceptor/tray
Carrying ObjectWafer, susceptor, tray
Contact us for the detailed specifications.
  • The image above and the video are of SSY-10020.


New type of wafer handling system for wafers including LED.

  • Automatic loader/unloader for batch processing such as susceptors or trays is achieved.
  • Aligner is installed both for wafers and susceptors, which provides the centering and indexing of wafer notch and susceptors.

Standard Specifications

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Outline Drawing (Standard)


Other Option

*The teaching box appeared in the table may be unavailable depending on the specifications.

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking