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Aligner

SVAL3001 (Vacuum Aligner)Wafer Aligner

SVAL3001

Product Video

Usage Environment/Specifications

Product Profile

Product Model	SVAL3001
Environment	Vacuum area (Temp. 15°C to 50°C)
Wafer Size	100 to 300mm, others
Carrying Object	silicon wafer, susceptor

The image above and the video are of SVAL3001.

Characteristics

Edge-grip vacuum aligner for susceptor tray (compound semiconductors and Si wafers).
High-speed and high-accuracy alignment is available.

Payload capacity: Below 4kg
Stand-alone aligner using vacuum resistance sensor (Set the controller in the atmospheric environment.)
Vacuum sealing: Magnetic fluid sealing and bellows are used.
Motion monitoring is available.
RS232C and parallel photo I/O are standard for control.
Index function: Rotate according to the wafer position in the tray.

Standard Specifications

Carrying Object	SEMI standard 100 to 300mm silicon wafer, various types of susceptors
Positioning Accuracy	Centering: Within ±0.3 mm Notch locating: Within ±0.3 deg
Positioning Time	Notch search : Within 4 sec
Sensor	Vacuum resistance definite-reflective sensor
Vacuum sealing	Magnetic fluid sealing Welded metal bellows (stroke: 40 mm)
Driving method	2-phase stepping motor (for 3 axes) Separate controller
Vacuum resistance	1.33×10^-6Pa
Utility	Power: DC24V±10% 8A

Outline Drawing

Icon guide

...Atmosphere
...Vacuum
...Waterproof
...Thin wafer
...CE marking
...JEL's standard spec.
...KCs marking