Robot for Semiconductor
STVCR4190 (Servo motor with absolute encoder)4-Axis Cylindrical Coordinate Clean Robot
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Usage Environment/Specifications
Product Profile
| Model Name | STVCR4190 |
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| Environment | Vacuum (Temp. 15°C to 50°C) |
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| Driving unit：Clean room atmosphere (Temp. 15°C to 40°C) |
| Arm | Twin arm |
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| Operating Range | 380mm (3rd joint center) |
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| Vertical Stroke | 50mm |
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| Payload Capacity | 3kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| STVCR4190-050-AM | 50mm |
- The image above is of STVCR4190-050-SM.
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Characteristics
Designed for handling wafers in the vacuum chamber of production line and inspection line.
Double payload and superior cost performance compared to STVHR series.
Compatible with STVHR series and it is possible to replace or upgrade into STVCR series.
Execution of origin search is not required by using the servo motors with absolute encoders.
- Magnetic fluid sealing is used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Twin-arm reduces the wafer swap time.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motors with absolute encoders installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- AC servo motor or 2-phase pulse motor type is selectable.
- Wafer holding: end-effector with passive edge or edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Representative specifications of STVCR4190-050-AM.
It can be changed depending on the carrying object and end-effector type.
| Robot Model |
STVCR4190-050-AM |
| Carrying Object |
Wafer up to 300mm |
| Wafer Holding Method |
By end-effector with passive edge or edge grip type end-effector |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
4-axis |
| Motor Type |
AC servo motor |
| Operating Range |
3rd joint center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 380mm |
330deg |
50mm |
| Carrying Speed |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 340mm/sec |
120deg/sec |
50mm/sec |
| Repeatability |
Within ±0.1mm |
| Cleanliness |
Magnetic fluid sealing and filter |
| Vacuum resistance |
1.33×10-6Pa |
| Mass |
Approx.80kg |
| Utility |
Power: AC200V Single phase ±10% 1kVA |
Option
End-Effector
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
Product Lineup
