System
SORTER SYSTEM (4-port inline type with 600 wafers/h throughput)
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Usage Environment/Specifications
Product Profile
| Product Model | SORTER SYSTEM |
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| Environment | Clean room atmosphere |
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| Wafer Size | 300mm |
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| Carrying Object | Silicon wafer |
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| Contact us for the detailed specifications. |
| Throughput | 600 wafers/h |
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- The image above and the video are of SORTER SYSTEM (4-port inline type with 600 wafers/h throughput).
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Characteristics
4 FOUP access is available without a track by installing 2 sets of horizontal and multi-joint type robot and an aligner.
- Compliance : SEMI Standard (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600)
- Aligner with buffer function is available for high-throughput (600 wafers/h).
- High-speed & high-accuracy wafer handling is available by area control.
- Wafer ID reader is available. (Reading both sides of wafer is an option)
Standard Specifications
Standard specifications for 4-port inline type with 600 wafers/h throughput (two sets of horizontal and multi-joint type robot)
| Carrier |
300mm FOUP (for 25 wafers) Compliance: SEMI E47.1, E62 |
| Carrying Object |
300mm Silicon wafer (Thickness: 775µm)
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| Throughput |
600 wafers/h
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| Cleanliness |
ISO Class 2 (when equipped with FFU)
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| Dimension |
W 1233mm x D 2160mm x H 2000mm
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| Mass |
Approx. 800kg
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| Utility |
Power: AC200V Single phase ±15% 15A |
| Dry air: 0.7MPa to 0.4MPa |
| Vacuum: -60kPa or more |
Option
Other Option
*The teaching box appeared in the table may be unavailable depending on the specifications.
Product Lineup
