Aligner
SAL2081 (Edge-grip type)Wafer Aligner
Product Video
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Usage Environment/Specifications
Product Profile
Product Model | SAL2081 |
Environment | Clean room atmosphere |
Wafer Size | 200 mm |
Carrying Object | Silicon wafer |
- The image above is of SAL2081, and the video is of SAL20C1.
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Characteristics
Designed for aligning wafers in a production line or inspection line of semiconductor.
- Minimized footprint and designed for aligning small wafer.
- High-speed, high-accuracy centering and flat/notch locating of small wafer.
Standard Specifications
Carrying Object |
SEMI standard 200 mm silicon wafer (Notch) |
Positioning Accuracy |
Centering: Within ±0.2 mm Notch locating: Within ±0.2 deg |
Positioning Time |
Notch search : 15 sec (Wafer pick-up/placing time excluded) |
Sensor |
Red LED transmissive sensor |
Wafer Holding Method |
By edge grip |
Cleanliness |
0.1 µm/cf Class 1 (at wafer transfer level when exhausting driving part) |
Driving method |
Small size stepping motors at each axis (internal motor driver) |
Product Lineup