JEL-Leading Manufacturer of Clean Robot



Aligner

SAL2061 (Edge-grip type)Wafer Aligner

SAL20C1

Product Video

Usage Environment/Specifications


Product Profile

Product ModelSAL2061
EnvironmentClean room atmosphere
Wafer Size150 mm
Carrying ObjectSilicon wafer
  • The image above and the video are of SAL20C1.

Characteristics

Designed for aligning wafers in a production line or inspection line of semiconductor.

  • Minimized footprint and designed for aligning small wafer.
  • High-speed, high-accuracy centering and flat/notch locating of small wafer.

Standard Specifications

Carrying Object JEIDA standard 150 mm silicon wafer
Positioning Accuracy Centering: Within ±0.3 mm
Orientation flat locating: Within ±0.2 deg
Positioning Time Orientation flat search: Within 4 sec (Wafer pick-up/placing time excluded)
Sensor Red LED transmissive sensor
Wafer Holding Method By edge grip
Cleanliness 0.1 µm/cf Class 1 (at wafer transfer level when exhausting driving part)
Driving method Small size stepping motors at each axis (internal motor driver)
Utility Power: DC24V±10% 2A


Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking