Robot for Semiconductor
MCR3160C3-Axis Cylindrical Coordinate Clean Robot
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Usage Environment/Specifications
Product Profile
| Model Name | MCR3160C |
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| Environment | Clean room atmosphere |
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| Arm | Single arm |
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| Operating Range | 400mm (3rd joint center) |
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| Vertical Stroke | 300mm / 400mm / 500mm |
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| Payload Capacity | 4kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| Standard | MCR3160C-300-AM | 300mm |
| | MCR3160C-400-AM | 400mm |
| | MCR3160C-500-AM | 500mm |
- The image above is of MCR3160C-300-AM.
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Characteristics
Designed for handling 300mm wafers in a production line or inspection line of semiconductor.
High-speed handling by AC servo motor and superior cost performance compared to MHR type.
Execution of origin search is not required by using the servo motors with absolute encoders.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motors with absolute encoders installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with JEL standard end-effector (vacuum type)
| Robot Model |
MCR3160C-300-AM |
| Carrying Object |
Wafer up to 300mm |
| Wafer Holding Method |
By vacuum suction |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
3-axis |
| Motor Type |
AC servo motor |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 567.7mm |
340deg |
300mm |
| Carrying Speed(Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1000mm/sec |
360deg/sec |
350mm/sec |
| Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1800mm/sec |
580deg/sec |
530mm/sec |
| Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| Below 9.82µm |
0.0015deg |
1.96µm |
| Handling level |
639mm (Base mounting level to end-effector level) |
| Repeatability |
Within ±0.1mm |
| Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
| Utility |
Power: AC200V single phase ±10% 3kVA; Vacuum: -53kPa or more |
| Controller Model |
C5000S series |
| Interface |
RS232C and parallel photo I/O |
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Option
End-Effector
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
Product Lineup
