Robot for FPD
LVHR3440S (FPD glass substrate)3-Axis Cylindrical Coordinate Clean Robot
|
Usage Environment/Specifications
Product Profile
| Model Name | LVHR3440S |
|---|
| Environment | Clean room atmosphere (Temp. 15°C to 40°C) |
|---|
| *Vacuum robot:vacuum chamber temp. 15°C to 50°C or less |
| Arm | Single arm |
|---|
| Operating Range | 880mm (3rd joint center) |
|---|
| Vertical Stroke | 20mm/ 32mm/ 40mm/ 60mm/ 320mm |
|---|
| Payload Capacity | Below 10kg (calculated for the arm 3rd joint) |
|---|
List of Product Model
| Product Model | Vertical Stroke |
|---|
| LVHR3440S-020-SM | 20mm |
| LVHR3440S-032-SM | 32mm |
| LVHR3440S-040-SM | 40mm |
| LVHR3440S-060-SM | 60mm |
| LVHR3440S-320-SM | 320mm |
- The image above is of LVHR3440S-040-SM.
|
Characteristics
Designed for handling FPD substrate in a PFD production line or inspection line.
- Arm lineup: 330mm, 440mm, 500mm, 550mm
- Magnetic fluid sealing are used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motors with absolute encoders installed in all axes.
- High-speed, high-accuracy glass handling by S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Representative specifications of LVHR3440S-040-SM.
It can be changed depending on the carrying object and end-effector type.
| Robot Model |
LVHR3440S-040-SM |
| Carrying Object |
730mm×920mm×1.1mm FPD glass substrate(representative example) |
| Robot Model Type |
Cylindrical coordinate type |
Control Axis |
3-axis |
| Motor Type |
AC servo motor |
| Operating Range |
3rd joint center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 880mm |
±182deg |
40mm |
| Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1320mm/2.7sec |
180deg/1.8sec |
40mm/2.0sec |
| Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| Below 13.5µm |
0.00097deg |
0.61µm |
| Handling level |
168.5mm (Mounting level to upper end-effector level |
| Repeatability |
Within ±0.2mm |
| Cleanliness |
Magnetic fluid sealing and filter |
| Utility |
Power: AC200V single phase ±10% 2kVA |
Option
End-Effector
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
Product Lineup
