Robot for Semiconductor
JVCR4330 (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED)
Product Video
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Usage Environment/Specifications
Product Profile
| Model Name |
JVCR4330 |
| Environment |
Clean room atmosphere |
| Arm |
Single arm |
| Operating Range |
1290 mm (robot center to substrate center) |
| Vertical Stroke |
60 mm |
| Payload Capacity |
10 kg |
List of Product Model
| Product Model |
Vertical Stroke |
| JVCR4330-060-AM |
60 mm
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- The image above and the video are of JVCR4330-060-AM.
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Characteristics
Horizontal and Multi-Joint Type Vacuum Robot for Micro LED.
- Suitable for access to the parallel layout.
- Maximum payload capacity of 10 kg.
Standard Specifications
Standard specifications with JVCR4330-060-AM (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED)
| Robot Model |
JVCR4330-060-AM |
| Carrying Object |
700 mm susceptors (10 kg) |
| Substrate Holding Method |
Friction retaining by O-ring. |
| Robot Model Type |
Horizontal and multi-joint type |
Control Axis |
4-axis |
| Motor Type |
AC servo motor |
| Operating Range |
From robot center to wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1290 mm |
360 deg |
60 mm |
| Carrying Speed |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 640 mm/4.0 sec |
360 deg/5.0 sec |
60 mm/2.0 sec |
| Resolution |
1st Joint Axis (J1 axis) |
2nd Joint Axis (J2 axis) |
3rd Joint Axis (J3 axis) |
| 8.1x10-4 deg |
8.1x10-4 deg |
7.2x10-4 deg |
| Z-axis (J4 axis) |
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| 0.98 µm |
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| Repeatability |
Within ±0.1 mm |
| Cleanliness |
Robot main body: 0.1 µm/cf Class 1 |
| Utility |
Power: AC200V Single phase ±10% 4.0 kVA
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| Mass |
Robot main body: Approx. 90 kg |
| Controller Model |
C5000S series |
| Interface |
RS232C and parallel photo I/O |
Product Lineup
