JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

JVCR4330 (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED)

JVCR4330 (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED)

Product Video

Usage Environment/Specifications

Product Profile

Model Name JVCR4330
Environment Clean room atmosphere
Arm Single arm
Operating Range 1290 mm (robot center to substrate center)
Vertical Stroke 60 mm
Payload Capacity 10 kg

List of Product Model

Product Model Vertical Stroke
JVCR4330-060-AM 60 mm
  • The image above and the video are of JVCR4330-060-AM.


Horizontal and Multi-Joint Type Vacuum Robot for Micro LED.

  • Suitable for access to the parallel layout.
  • Maximum payload capacity of 10 kg.

Standard Specifications

Standard specifications with JVCR4330-060-AM (Horizontal and Multi-Joint Type Vacuum Robot for Micro LED)
Specifications of Robot
Robot Model JVCR4330-060-AM
Carrying Object 700 mm susceptors (10 kg)
Substrate Holding Method Friction retaining by O-ring.
Robot Model Type Horizontal and multi-joint type Control Axis 4-axis
Motor Type AC servo motor
Operating Range From robot center to wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1290 mm 360 deg 60 mm
Carrying Speed Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
640 mm/4.0 sec 360 deg/5.0 sec 60 mm/2.0 sec
Resolution 1st Joint Axis (J1 axis) 2nd Joint Axis (J2 axis) 3rd Joint Axis (J3 axis)
8.1x10-4 deg 8.1x10-4 deg 7.2x10-4 deg
Z-axis (J4 axis)  
0.98 µm  
Repeatability Within ±0.1 mm
Cleanliness Robot main body: 0.1 µm/cf Class 1
Utility Power: AC200V Single phase ±10% 4.0 kVA
Mass Robot main body: Approx. 90 kg
Specifications of Controller
Controller Model C5000S series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking