Robot for Semiconductor
JCR4400 (Transfer Robot with Auto alignment for PLP)
Product Video
|
Usage Environment/Specifications
Product Profile
| Model Name |
JCR4400 |
| Environment |
Clean room atmosphere |
| Arm |
Single arm |
| Operating Range |
1290 mm (robot center to substrate center) |
| Vertical Stroke |
400 mm |
| Payload Capacity |
10 kg (calculated for the arm 3rd joint)
|
List of Product Model
| Product Model |
Vertical Stroke |
| JCR4400-400-AM |
400 mm |
- The image above and the video are of JCR4400-400-AM (Transfer Robot with Auto alignment for PLP).
|
Characteristics
4-axis horizontal and multi-joint type clean robot with auto alignment for PLP.
- Suitable for access to the parallel layout
- Transfer with high accuracy by non-contact alignment
- Maximum payload capacity of 10 kg
Standard Specifications
Standard specifications with JCR4400-400-AM (Transfer Robot with Auto alignment for PLP)
| Robot Model |
JCR4400-400-AM |
| Carrying Object |
Substrate 500 mm x 500 mm |
| Substrate Holding Method |
By vacuum suction with end-effector |
| Robot Model Type |
Horizontal and multi-joint type |
Control Axis |
4-axis |
| Motor Type |
AC servo motor |
| Operating Range |
From robot center to wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1290 mm |
330 deg |
400 mm |
| Carrying Speed |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1170 mm/1.6 sec |
330 deg/1.5 sec |
400 mm/1.4 sec |
| Resolution |
1st Joint Axis (J1 axis) |
2nd Joint Axis (J2 axis) |
3rd Joint Axis (J3 axis) |
| 3.5x10-3 deg |
1.8x10-3 deg |
1.8x10-3 deg |
| Z-axis (J4 axis) |
|
| 2.4x10-3 deg |
|
| Repeatability |
Within ±0.2 mm |
| Cleanliness |
Robot main body: 0.3 µm/cf Class 10 (when exhausting driving area)
|
| Utility |
Power: AC200V Single phase ±10% 4 kVA
Vacuum: -53 kPa or more
|
| Mass |
Robot main body: Approx. 120 kg |
| Controller Model |
C5000S series |
| Interface |
RS232C and parallel photo I/O |
|
Product Lineup
