JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

JCR4400 (Robot with substrate alignment function)

JCR4400 (Robot with substrate alignment function)

Product Video

Usage Environment/Specifications

Product Profile

Model NameJCR4400
EnvironmentClean room atmosphere
ArmSingle arm
Operating Range1290 mm (robot center to substrate center)
Vertical Stroke320 mm
Payload Capacity15 kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
JCR4400-320-AM320 mm
  • The image above and the video are of JCR4400-320-AM (Robot with substrate alignment function).

Characteristics

4-axis horizontal and multi-joint type clean robot for high accuracy handling of mask or molded substrate (FOPLP=Fan-Out Panel Level Package) .
With the simultaneous substrate alignment (Y direction) and substrate end face detection (X direction) , substrate is held after centering is completed.
Tact time can be shortened as it is not necessary to install the centering mechanism.
Also, accessible to the cassettes placed in parallel.

  • RS232C and parallel photo I/O are standard for control.
  • AC servo motors with absolute encoders installed in all axes

Standard Specifications

Standard specifications with JCR4400-320-AM (Substrate alignment function)
Specifications of Robot
Robot Model JCR4400-320-AM
Carrying Object Substrate 500 mm x 517 mm(5 kg)
Substrate Holding Method By vacuum suction with end-effector
Robot Model Type Horizontal and multi-joint type Control Axis 4-axis
Motor Type AC servo motor
Operating Range From robot center to wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1290 mm 335 deg 320 mm
Carrying Speed Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
1140 mm/1.6 sec 335 deg/1.5 sec 320 mm/1.1 sec
Resolution 1st Joint Axis (J1 axis) 2nd Joint Axis (J2 axis) 3rd Joint Axis (J3 axis)
3.15x10-7 deg 1.78x10-7 deg 2.14x10-7 deg
Z-axis (J4 axis)  
3.97x10-7 deg  
Repeatability Within ±0.2 mm
Cleanliness Robot main body: 0.3 µm/cf Class 10 (when exhausting driving area)
Utility Power: AC200V Single phase ±10% 4.5 kVA
Vacuum: -53 kPa or more
Mass Robot main body: Approx. 80 kg
Specifications of Controller
Controller Model C5000S series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
JCR4400-320-AM

Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking