JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

GTVCR53305-Axis Horizontal and Multi-Joint Type Clean Robot


Product Video

Usage Environment/Specifications

Product Profile

Model NameGTVCR5330
EnvironmentClean room atmosphere (Temp. 15°C to 40°C)
Process chamber  (Max. Temp. 450°C)
ArmSingle arm
Operating Range635mm (3rd joint center)
Vertical Stroke60mm
Payload CapacityBelow 4kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
  • The image above and the video are of GTVCR5330-060-AM (*The robot in the image and video uses the four end-effectors.)


Achieved cost reduction while maintaining the performance and functions of conventional robot GTVHR5000 series.
Transfers to the parallel stages in the vacuum chamber and supports various layouts, reducing footprint and vacuuming volume.
Simplification of the chamber layout leads to the cost reduction.
Suitable to the inline layout.
Execution of origin search is not required by using the servo motors with absolute encoders.

  • Arm lineup: 280mm, 330mm
  • Magnetic fluid sealing is used for arm joint.
  • Vacuum sealing: Magnetic fluid sealing and bellows are used.
  • For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
  • Twin end-effector reduces the wafer swap time.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • AC servo motors with absolute encoders installed in all axes.
  • High-speed, high-accuracy wafer handlingby S-curved speed control.
  • Wafer holding: end-effector with passive edge or edge grip type end-effector, and friction retaining by O-ring.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Representative specifications of GTVCR5330-060-AM.
It can be changed depending on the carrying object and end-effector type.
Specifications of Robot
Robot Model GTVCR5330-060-AM
Carrying Object Wafer up to 300mm
Robot Model Type Horizontal and multi-joint type Control Axis 5-axis
Motor Type AC servo motor
Operating Range 3rd Joint Center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
635mm 360deg 60mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
640mm/sec 160deg/sec 60mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
950mm/sec 200deg/sec 85mm/sec
Resolution 1st Joint Axis (J1-axis)
2nd Joint Axis (J2-axis)
3rd Joint Axis (J3-axis)
3rd Joint Axis (J5-axis)
Z-Axis (J4-axis)
Repeatability Within ±0.1mm
Handling Level 219mm (Mounting level to upper end-effector level)
Cleanliness Magnetic fluid sealing and filter
Vacuum resistance 1 x 10-6Pa
Utility Power: AC200 to 230V 2kVA 50/60Hz
Specifications of Controller
Controller Model C5000S series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single end-effector
  • ...Twin end-effector
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking