Robot for Semiconductor
GCR4280 (For large diameter wafer)4-Axis Horizontal and Multi-Joint Type Clean Robot
Product Video
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Usage Environment/Specifications
Product Profile
| Model Name | GCR4280 |
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| Environment | Clean room atmosphere |
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| Arm | Single arm |
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| Operating Range | 553mm (3rd joint center) |
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| Vertical Stroke | 300mm / 420mm |
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| Payload Capacity | Below 4kg (calculated for the arm 3rd joint) |
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List of Product Model
| Product Model | Vertical Stroke |
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| Standard | GCR4280-300-AM | 300mm |
| | GCR4280-420-AM | 420mm |
- The image above and the video are of GCR4280-300-AM.
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Characteristics
Designed for handling large diameter wafer in a production line or inspection line of semiconductor.
Execution of origin search is not required by using the servo motors with absolute encoders.
- 3 FOUP access is available for robot only (for 300mm wafer). 2 FOUP access is available without a track for 450mm wafer.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- AC servo motors with absolute encoders installed in all axes.
- High-speed, high-accuracy wafer handling by S-curved speed control and optimizing pass control.
- Wafer holding: end-effector with vacuum suction, passive edge, or edge grip.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Example of standard specifications with JEL standard end-effector (vacuum type) for 300mm wafer.
| Robot Model |
GCR4280-300-AM |
| Carrying Object |
SEMI standard up to 450mm silicon wafer, small glass substrate |
| Wafer Holding Method |
By vacuum suction |
| Robot Model Type |
Horizontal and multi-joint type |
Control Axis |
4-axis |
| Motor Type |
AC servo motor |
| Operating Range |
From the robot center to the wafer center |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 863mm |
335deg |
300mm |
| Carrying Speed (Ave.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 900mm |
250deg/sec |
300mm/sec |
| Carrying Speed (Max.) |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 1300mm |
350deg/sec |
450mm/sec |
| Resolution |
Arm (R-axis) |
Rotation Angle (Theta-axis) |
Vertical Stroke (Z-axis) |
| 0.0018deg |
0.0015deg |
1.96µm |
| Handling level |
669mm (Base mounting level to end-effector level) |
| Cleanliness |
ISO Class 2 (at wafer transfer level when exhausting driving part) |
| Repeatability |
Within ±0.1mm |
| Utility |
Power: AC200V single phase ±10% 2kVA; Vacuum: -53kPa or more |
| Controller Model |
C5000S series |
| Interface |
RS232C and parallel photo I/O |
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Option
End-Effector
*Click the items below to review the end-effectors other than JEL standard types.
Other Option
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