SEMICON Japan 2013: Thanks for coming to the exhibition
Date : December 4,2013
Thank you very much for coming to our exhibition booth. For more information on our products as well as the exhibited products below, please go to the product page or contact us.
Date: Wed., December 4 - Fri., December 6, 2013
Venue: Makuhari Messe, Chiba Japan
JEL booth: No. 4A-501
Products for Exhibition
Clean robot & Aligner for handling 450mm wafer:
GCR4280-420-AM/SAL30J1HV (New model)
・Robot with edge grip end-effector and flip function
We demonstrated high-speed handling of 450mm wafer.
・New aligner for notchless wafer
Clean robot & Aligner for handling wafer:
STCR4160SN-300-PM (New model)/SAL3481HV (New model)
・New twin-arm robot with low-cost, high-speed handling, and no step-out
error
・New aligner available for any material of wafer
Table-top loader system:
SSY-10000
・Available for various types of wafers; 2, 3 inch, 100mm glass, sapphire, SiC,
or GaN or others
Clean robot for handling wafer & Bernoulli type aligner:
STCR4160SN-300-PM (New model)/SAL3481
New twin-arm robot with low-cost, high-speed handling, and no step-out error
・Vacuum suction type end-effector to hold wafer edge (5mm from the edge):
Random access is available
・Thin Bernoulli type end-effector (Patent pending):
For warped or thin wafer, and random access to cassette slot is available
Bernoulli type end-effector and Bernoulli hand for thin or warped wafer:
Bernoulli Hand: BRP-01
・Low-cost Bernoulli type end-effector available for customization