SEMICON Taiwan 2013
Thank you very much for coming to our exhibition booth at SEMICON Taiwan 2013 during September 4-6. For more information on our products as well as the exhibited products below, please go to the product page or contact us.
Date: September 4-6, 2013
Venue: TWTC Nangang Exhibition Hall, Taiwan
Booth: No. L700
Products for Exhibition
Bernoulli hand
Light and compact, the Bernoulli hand holds thin wafers using the Bernoulli principle.
Wafer breakage risk is minimized due to non-suction holding.
Bernoulli type end-effector for thin or warped wafers（manufactured by JEL）
We have developed the low-cost Bernoulli type end-effector.
As an ideal end-effector for thin and warped wafers, we provide the Bernoulli type end-effector at its most suitable design according to the customers’ system layout.
High speed handling MTCR
: MTCR4160CS-300
High speed handling and cost performance are achieved by installing AC servo motors in all axes.
Compact clean robot & Aligner for handling 2, 3 inch, 100, 150mm wafers
: SCR3100S-200-PM/SAL3261GR
We present the robot for safety and high-accuracy handling of 2, 3inch, and 100, 150mm LED sapphire wafer, and the aligner for high-accuracy centering for wafer.
We offer the compact system with flexibility.