JEL-Leading Manufacturer of Clean Robot

JEL’s Various Software

The following are JEL's various software.
The communication software, JELDATA3 can be downloaded from the link below.
*Please note: the user registration and login are required.
The alignment adjustment software, JEL ALIGN TOOL is attached with the aligners SAL3000HV series.
*See the list below for the applicable models and supported OS.

Software list

Software common for all JEL products: Communication Software JELDATA3

    Supported OS

  • Windows 7 (32 bit): Version 1.3.5
  • Windows XP (32 bit): Version 1.3.5

 Click here for download
(*Login is required.  If you are a new user, click here for user registration.)

Dedicated software for Aligner: Alignment Adjustment Software JEL ALIGN TOOL

    Applicable model: SAL3000HV Series

  • SAL3262HV (For 2 inch to 150 mm wafer)
  • SAL3482HV (For 100 mm to 200 mm wafer)
  • SAL38C3HV (For 200 mm to 300 mm wafer)

    Supported OS

  • Windows 7 (32/64 bit)
  • Windows 8.1 (64 bit)
  • Windows 10 (32/64 bit)
  • Windows Embedded (32 bit)

 Click to see the details