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Wafer-Search Operation Procedure

9: Teaching and setting of the start position of wafer-search

[1] Teach the robot the start position of wafer-search.
[2] Set the point of the start position of wafer-search.
The start position of wafer-search should be set to the position lower than 3 mm of the first slot of the cassette (WLO).
*The procedure varies depending on cassette or wafer types.
start position of wafer search
Note 1: When the start position of wafer-search is too close to the first slot, it may fall within the range of “6: Setting of the detection gate width of wafer (WWG setting)” and it may cause an error in wafer-search of the lowest slot.
caution of start position
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