JEL-Leading Manufacturer of Clean Robot

Wafer-Search Operation Procedure

7: Setting of the stop position of wafer-search completion (WEND setting)

*WEND command may not be used depending on specifications

Set the stop position of wafer-search completion.
Set the stop position of wafer-search completion via serial communication.
Input the following commands for configuration:
(When the robot is $1, the commands are: $1WEND ****)

Input the pulse number that is required to move to the stop position in "DEC".
Obtain the current designated data
Data to be set

The stop position of wafer-search completion is the position where the robot stops at the position of “2: Setting of the highest slot in the cassette (WHI setting)" + "Stop position of wafer-search completion" when wafer-search is completed.

Example) “WHI = 4000” setting:
Given the “WEND = 100” setting, the stop position when wafer-search is completed is 4100.
example setting WHI=4000
Note 1: When WEND value is too large, the robot may interfere with cassettes.
Note 2: When WEND value is too small, it may fall within the range of “6: Setting of the detection gate width of wafer (WWG setting)” and it may cause an error in wafer detection of the highest slot.
caution of setting



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