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11: The results of wafer-search differ between via Parallel I/O and via serial communication.

Troubleshooting of Wafer Search Operation

11: The results of wafer-search differ between via Parallel I/O and via serial communication.

The output of the results of wafer-search may not be received in the PLC.
Refer to the PLC functions in the instruction manual and change the output pulse width (minimum width) of the busy signal.

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