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6: Search failure occurs when wafer-search using thin wafers is started.

Troubleshooting of Wafer Search Operation

6: Search failure occurs when wafer-search using thin wafers is started.

The minimum detection width of wafer is not correct.
As specified in “4: Setting of the minimum detection width of wafer (WWN setting)” of Wafer-Search Operation Procedure, set it again.

When the speed of wafer-search becomes faster, the detection width tends to become smaller.
As specified in “8: Setting of the speed of wafer-search (WSP setting)” of Wafer-Search Operation Procedure, set it smaller than the current setting.

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