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3: Search failure occurs in the middle slot of the cassette when wafer-search is started.

Troubleshooting of Wafer Search Operation

3: Search failure occurs in the middle slot of the cassette when wafer-search is started.

Isn’t the speed of wafer-search too fast?
As specified in “8: Setting of the speed of wafer-search (WSP setting)” of Wafer-Search Operation Procedure, set the speed lower than the current speed.

Technical Information

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