JEL-Leading Manufacturer of Clean Robot



System

SSY-11010Automatic wafer transfer system for wafer container

SSY-11010 Automatic wafer transfer system for wafer container  

Product Video

Usage Environment/Specifications


Product Profile

Product ModelSSY-11010
EnvironmentClean room atmosphere
Applicable Cassette Type150 mm, 200 mm container, 150 mm, 200 mm wafer cassette
Wafer Size150 mm, 200 mm
Carrying ObjectSilicon wafer, spacer (interlayer paper)
Contact us for other wafer sizes, the number of wafer containers and cassettes, or aligner installation etc.
     
  • The image and video above is of SSY-11010.

Characteristics

High accuracy handling of thin wafer inside the wafer container and cassette.

  • Automatic recognition of wafer and the spacer (interlayer paper).
  • Automatic wafer transfer between the wafer container and the wafer cassette (package/unpackage).
  • Available for thin wafer as equipped with Bernoulli end-effector.
  • Automatic recognition of the height of wafer.
  • The number of cassettes and the wafer sizes can be customized.
  • Opening mechanism is installed to pick up/place wafers from a wafer container safely (patent pending).
  • Two fan filter units (HEPA) are installed to ensure the cleanliness.
  • Color sensor allows spacers (interlayer papers) with different colors to be detected easily.

Standard Specifications

Contact us for other wafer sizes, the number of wafer containers and cassettes, or aligner installation etc.
Carrying Object 150 mm, 200 mm silicon wafer, 150 mm, 200 mm spacer (interlayer paper)
Applicable Cassette Type 150 mm, 200 mm wafer container, 150 mm, 200 mm cassette
Cleanliness ISO Class 2
External Dimensions 1600 (W) x 1180 (D) x 1800 (H) (mm)
Utility Power: AC200V±10%  Clean air: 0.5 MPa 150 NL/min or more
Mass 600 kg
The port to collect spacers (interlayer papers) and the port to dispose spacers (attached with a collect door) are selectable.
(The drawing above is the specifications with the disposal port with a collect door.)
Outline Drawing (Standard)
SSY-11010

Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking