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SC3-YW-240Vacuum Type End-Effector

SC3-YW-240

Usage Environment/Specifications


Product Profile

Model NameSC3-YW-240
Carrying Size300mm
Carrying ObjectMainly silicon wafer

Characteristics

Y-shaped vacuum suction type end-effector, suitable for handling 300mm wafer (Random access is available).
Used extensively for atmospheric robot, the end-effector holds the backside of wafer by vacuum suction (negative pressure).
Conductive Teflon coating on the surface of end-effector protects against damage from charging.


Standard Specifications

Carrying Object SEMI standard 300mm (Mainly silicon wafer)
Material High purity alumina ceramic sintered body
Surface Treatment Conductive Teflon coating
Wafer Holding Method Vacuum suction
Total Length 240mm
Thickness 3mm

Please contact us for the detailed specifications.

Outline Drawing (Standard)
SC3-YW-240

Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking