JEL dedicated website for SEMICON exhibition robots
KHR3480 (for 25 wafers batch transfer, 300 mm wafers)
Product Video
Usage Environment/Specifications
Product Profile
Product Model
KHR3480
Environment
Clean room atmosphere
Stroke
480 mm
Vertical Stroke
290 mm
Carrying Object
25 pieces of 300 mm silicon wafers
List of Product Model
Product Model
Vertical Stroke
KHR3480-290-AM
290 mm
The image above and the video are of KHR3480-290-AM (for 25 wafers batch transfer, 300 mm wafers)
Characteristics
Capable of transferring 25 wafers at once.
The transfer time can be significantly reduced by batch transfer.
Available for the layout with multiple cassettes by equipping a rotation axis.
End-effector material: ceramic
Wafer holding: end-effector with passive edge, edge alignment.
AC servo motors with absolute encoders installed in all axes (Batteryless)
Standard Specifications
Specifications of KHR3480-290-AM.
Specifications of Robot
Robot Model
KHR3480-290-AM
Carrying Object
300 mm silicon wafer
Wafer Holding Method
end-effector with passive edge, edge alignment.
Robot Model Type
Cylindrical coordinate type
Control Axis
3-axis
Motor Type
AC servo motor
Operating Range
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
720 mm
±320 deg
290 mm
Carrying Speed (Ave.)
Arm (R-axis)
Rotation Angle (Theta-axis)
Vertical Stroke (Z-axis)
240 mm/sec
72 deg/sec
100 mm/sec
Handling Level
650 mm
Repeatability
±0.2 mm
Cleanliness
Equivalent to ISO class 5 (ISO14644） (at wafer transfer level when exhausting driving part)
