SAL30J1HV (For 450mm wafer) Wafer Aligner
|Environment||Clean room atmosphere|
|Carrying Object||Silicon wafer|
(with T7 code or notch)
- This video shows GCR4280-420-AM and SAL30J1HV.
*The monitor is for demonstration only.
For handling 450mm notchless wafer
- High-speed and High-accuracy positioning based on the wafer edge, T7 code or notch for 450mm Silicon wafer.
- Equipped with JEL-developed image sensor, and internal motor driver and controller.
- Size, shape, material of spindle can be changed according to the wafer type.
- Control: RS232C and parallel photo I/O
- Aligner for 450mm and 300mm wafer is available with the same footprint.
- Optional Z-axis for pick-up/place operation is available.
||SEMI standard 450mm Silicon wafer (with T7 code or notch)
||Centering: Within ±0.1mm
Locating: Within ±0.1deg
||Within 4 sec.
||LED light, wafer edge detection with image sensor unit
|Positioning Offset Range
||Within 8mm radius
|Wafer Holding Method
||By vacuum suction
||ISO Class 2 (at wafer transfer level when exhausting driving part)
||Power: DC24V±10% 3A Vacuum: -53kPa or more