JEL-Leading Manufacturer of Clean Robot

Robot for Semiconductor

MCR3200C3-Axis Cylindrical Coordinate Clean Robot


Usage Environment/Specifications

Product Profile

Model NameMCR3200C
EnvironmentClean room atmosphere
ArmSingle arm
Vertical Stroke300mm / 400mm / 500mm

List of Product Model

Product ModelVertical Stroke
  • The image above is of MCR3160C-300-AM.


Designed for handling 300mm wafers in a production line or inspection line of semiconductor.
High-speed handling by AC servo motor and superior cost performance compared to MHR type.
Execution of origin search is not required by using the servo motors with absolute encoders.

  • Base or flange mounting type is selectable.
  • Motion monitoring is available.
  • RS232C and parallel photo I/O are standard for control.
  • AC servo motors with absolute encoders installed in all axes.
  • High-speed, high-accuracy wafer handlingby S-curved speed control.
  • Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
  • End-effector material: CFRP, Al, ceramic, or others.
  • Optimal end-effector is selectable according to the carrying object and line layout.

Standard Specifications

Please contact us for the detailed specifications.

Outline Drawing (Standard)



*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup

Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking