JEL-Leading Manufacturer of Clean Robot



Robot for Semiconductor

GCR4280 (large diameter/edge-grip)4-Axis Horizontal and Multi-Joint Type Clean Robot

GCR4280-420-AM (450mm/edge-grip end-effector)

Product Video

Usage Environment/Specifications

Product Profile

Model NameGCR4280
EnvironmentClean room atmosphere
ArmSingle arm
Operating Range553mm (3rd joint center)
Vertical Stroke420mm
Payload Capacity4kg (calculated for the arm 3rd joint)

List of Product Model

Product ModelVertical Stroke
GCR4280-420-AM420mm
  • The image above and the video are of GCR4280-420-AM (large diameter/edge-grip).

Characteristics

For handling large diameter wafer with edge grip end-effector and flip function.
Execution of origin search is not required by using the servo motors with absolute encoders.

  • Rigid arm & high load capacity. Payload capacity: 4 kg (calculated for the arm 3rd joint/including end-effector & wafer)
  • Available for various handling such as flip-type edge grip end-effector and batch handling for 5 pieces of 300 mm wafers.
  • AC servo motor is installed in all axes.
    High-speed & high-accuracy wafer handling is available by area control and S-curved speed control.
  • Base or flange mounting type is selectable.
  • Bernoulli end-effector is available. (Option)

Standard Specifications

Example of standard specifications with JEL edge grip end-effector (for 450mm wafer).
Specifications of Robot
Robot Model GCR4280-420-AM
Wrist-Brock GARS09353 End-Effector 3D-08518
Carrying Object SEMI standard up to 450mm silicon wafer
Wafer Holding Method By edge grip
Robot Model Type Horizontal and multi-joint type Control Axis 4-axis
Motor Type AC servo motor
Operating Range From the robot center to the wafer center Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
988.2mm 335deg 420mm
Carrying Speed (Ave.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
280mm/sec 180deg/sec 180mm/sec
Carrying Speed (Max.) Arm (R-axis) Rotation Angle (Theta-axis) Vertical Stroke (Z-axis)
400mm/sec 250deg/sec 270mm/sec
Repeatability Within ±0.1mm
Cleanliness ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility Power: AC200V±10% Single phase 10A; Vacuum: -53kPa or more
Mass Approx. 55kg
Specifications of Controller
Controller Model C5000S series
Interface RS232C and parallel photo I/O
Outline Drawing (Standard)
GCR4280-420-AM (450mm/edge-grip end-effector)

Option

End-Effector

*Click the items below to review the end-effectors other than JEL standard types.

Other Option

Product Lineup


Icon guide
  • ...Atmosphere
  • ...Vacuum
  • ...Waterproof
  • ...Single arm
  • ...Twin arm
  • ...Thin wafer
  • ...CE marking
  • ...JEL's standard spec.
  • ...KCs marking