Wafer Size: SEMI Standards

( ): Allowable range

2-inch single-crystal
silicon wafer
3-inch single-crystal
silicon wafer
100mm single-crystal
silicon wafer
125mm single-crystal
silicon wafer
Diameter(in)
(mm)
2.000(±0.015)
50.80(±0.38)
3.000(±0.015)
76.20(±0.63)
-
100.000(±0.50)
-
125.000(±0.50)
Thickness(center point)(in)
(µm)
0.0110(±0.0010)
279(±25)
0.0150(±25)
381(±25)
-
525(±20) 625(±20)
-
625(±20)
Orientation flat length(in)
(mm)
0.625(±0.065)
15.88(±1.65)
0.875(±0.125)
22.22(±3.17)
-
32.5(±2.5)
-
42.5(±2.5)
Secondary flat length(in)
(mm)
0.315(±0.065)
8.00(±1.65)
0.440(±0.060)
11.18(±1.52)
-
18.0(±2.0)
-
27.5(±2.5)


150mm single-crystal
silicon wafer
200mm single-crystal
silicon wafer
300mm single-crystal
silicon wafer
Diameter(mm) 150.000(±0.20) 200.000(±0.20) 300.000(±0.20)
Thickness(center point)
(µm)
675(±20) 725(±20) 775(±20)
Orientation flat length
(mm)
57.5(±2.5) Notch depth 1.0(0.25,-0.00)
Angle 90(5,-1)
Orientation flat dia.
195.50(±0.20)
Notch depth 1.0(0.25,-0.00)
Angle 90(5,-1)
Secondary flat length
(mm)
37.5(±2.5) - -